The microspring of Figure 3.30 is formed of three pairs of beams, two side rigid connectors, and a rigid moving part. Determine the corresponding lumped-parameter physical model and calculate the...

The microspring of Figure 3.30 is formed of three pairs of beams, two side rigid connectors, and a rigid moving part. Determine the corresponding lumped-parameter physical model and calculate the spring stiffness in terms of the moving part and about the y direction. The short beams have a diameter d1 = 2 nm and the long ones have a diameter d2 = 3 nm. Known also are l1 = 100 nm, l2 = 140 nm, and Young’s modulus E = 155 GPa.