The maximum solubility of boron in silicon is 600 × 1024 atoms/m 3. a. What atomic percentage does this correspond to? b. What weight percentage does this correspond to? c. What is the maximum...


The maximum solubility of boron in silicon is 600 × 1024 atoms/m 3.


a. What atomic percentage does this correspond to?


b. What weight percentage does this correspond to?


c. What is the maximum electrical conductivity the B-doped Si can attain?


d. What are the implications of dopant solubility on device processing and properties?

Nov 18, 2021
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