Problem 5 Anisotropic silicon etching is used to create an inverted pyramid to serve as a microliter fluid reservoir. The mask layer is silicon nitride. The anisotropic etchant is EDP. Which of the...

Please, dont copy paste from chegg. If you can explain why your selection. Thank you

Extracted text: Problem 5 Anisotropic silicon etching is used to create an inverted pyramid to serve as a microliter fluid reservoir. The mask layer is silicon nitride. The anisotropic etchant is EDP. Which of the following masks will yield the largest reservoir volume? Assume all the diagrams are drawn with same scale. 1.а 2.b and c 3.e 4.b and d 5.a and c 6.a, c and d <110> <110> <100> <100> <110> a a a a a a a a a (a) (b) (c) (d) (e)