Observed Etch Rate (Å/min) RF Power Totals Averages (W) 1 2 3 4 5 Yi. 160 575 542 530 539 570 2756 551.2 180 565 593 590 579 610 2937 587.4 200 600 651 610 637 629 3127 625.4 220 725 700 715 685 710...

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Observed Etch Rate (Å/min)<br>RF Power<br>Totals<br>Averages<br>(W)<br>1<br>2<br>3<br>4<br>5<br>Yi.<br>160<br>575<br>542<br>530<br>539<br>570<br>2756<br>551.2<br>180<br>565<br>593<br>590<br>579<br>610<br>2937<br>587.4<br>200<br>600<br>651<br>610<br>637<br>629<br>3127<br>625.4<br>220<br>725<br>700<br>715<br>685<br>710<br>3535<br>707.0<br>y. = 12,355<br>y = 617.75<br>

Extracted text: Observed Etch Rate (Å/min) RF Power Totals Averages (W) 1 2 3 4 5 Yi. 160 575 542 530 539 570 2756 551.2 180 565 593 590 579 610 2937 587.4 200 600 651 610 637 629 3127 625.4 220 725 700 715 685 710 3535 707.0 y. = 12,355 y = 617.75

Jun 03, 2022

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Observed Etch Rate (Å/min) RF Power Totals Averages (W) 1 2 3 4 5 Yi. 160 575 542 530 539 570 2756 551.2 180 565 593 590 579 610 2937 587.4 200 600 651 610 637 629 3127 625.4 220 725 700 715 685 710...

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