Microlithography is a process that includes baking a semiconductor wafer. An experiment was conducted to study the temperature of a 200-mm-diameter wafer at different locations on the wafer during a...

Microlithography is a process that includes baking a semiconductor wafer. An experiment was conducted to study the temperature of a 200-mm-diameter wafer at different locations on the wafer during a new baking process. Independent random samples of wafers were selected, and a temperature sensor was placed on each wafer at one of four distances from the center of the wafer. The temperature was recorded (in °C) 80 seconds into the process. The summary statistics are given in the following table.