In 1990, Song et al published a paper showing that the DC self-bias potential VDc is a function of the amplitude of the driving RF voltage |VRF| and the area of the driven Ag and grounded electrodes...

Extracted text: In 1990, Song et al published a paper showing that the DC self-bias potential VDc is a function of the amplitude of the driving RF voltage |VRF| and the area of the driven Ag and grounded electrodes A, respectively. They found: Voc = |VRF| sin (A, – Ad \Ag + Aa) If |VRF| = 500 V and A =3A4 calculate both Vpc and the maximum possible value of the time-dependent plasma potential Vp.