Find the relationship between the electrostatic attraction force and the displacement of the mobile plate in a comb-drive (constant-gap, longitudinal-motion) capacitive actuator, such as the one...


Find the relationship between the electrostatic attraction force and the displacement of the mobile plate in a comb-drive (constant-gap, longitudinal-motion) capacitive actuator, such as the one sketched in Figure 4.11, assuming a constant dc voltage is applied between the two capacitor plates.

Nov 20, 2021
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