Consider the situation described in Exercise 6.70. A critical dimension (measured in mm) is of interest to the process engineer. Suppose that five fixed positions are used on each wafer (position 1 is...


Consider the situation described in Exercise 6.70. A critical dimension (measured in mm) is of interest to the process engineer. Suppose that five fixed positions are used on each wafer (position 1 is the center) and that two consecutive wafers are selected from each batch. The data that result from several batches are shown in Table 6E.32.


(a) What can you say about overall process capability?


(b) Can you construct control charts that allow within wafer variability to be evaluated?


(c) What control charts would you establish to evaluate variability between wafers? Set up these charts and use them to draw conclusions about the process.


(d) What control charts would you use to evaluate lotto- lot variability? Set up these charts and use them to draw conclusions about lot-to-lot variability.





















































































































































































































































































































































































TABLE 6 E .32



Data for Exercise 6.71







Position







Position



Lot



Wafer













Lot



Wafer













Number



Number



1



2



3



4



5



Number



Number



1



2



3



4



5



1



1



2.15



2.13



2.08



2.12



2.10



11



1



2.15



2.13



2.14



2.09



2.08





2



2.13



2.10



2.04



2.08



2.05





2



2.11



2.13



2.10



2.14



2.10



2



1



2.02



2.01



2.06



2.05



2.08



12



1



2.03



2.06



2.05



2.01



2.00





2



2.03



2.09



2.07



2.06



2.04





2



2.04



2.08



2.03



2.10



2.07



3



1



2.13



2.12



2.10



2.11



2.08



13



1



2.05



2.03



2.05



2.09



2.08





2



2.03



2.08



2.03



2.09



2.07





2



2.08



2.01



2.03



2.04



2.10



4



1



2.04



2.01



2.10



2.11



2.09



14



1



2.08



2.04



2.05



2.01



2.08





2



2.07



2.14



2.12



2.08



2.09





2



2.09



2.11



2.06



2.04



2.05



5



1



2.16



2.17



2.13



2.18



2.10



15



1



2.14



2.13



2.10



2.10



2.08





2



2.17



2.13



2.10



2.09



2.13





2



2.13



2.10



2.09



2.13



2.15



6



1



2.04



2.06



1.97



2.10



2.08



16



1



2.06



2.08



2.05



2.03



2.09





2



2.03



2.10



2.05



2.07



2.04





2



2.03



2.01



1.99



2.06



2.05



7



1



2.04



2.02



2.01



2.00



2.05



17



1



2.05



2.03



2.08



2.01



2.04





2



2.06



2.04



2.03



2.08



2.10





2



2.06



2.05



2.03



2.05



2.00



8



1



2.13



2.10



2.10



2.15



2.13



18



1



2.03



2.08



2.04



2.00



2.03





2



2.10



2.09



2.13



2.14



2.11





2



2.04



2.03



2.05



2.01



2.04



9



1



1.95



2.03



2.08



2.07



2.08



19



1



2.16



2.13



2.10



2.13



2.12





2



2.01



2.03



2.06



2.05



2.04





2



2.13



2.15



2.18



2.19



2.13



10



1



2.04



2.08



2.09



2.10



2.01



20



1



2.06



2.03



2.04



2.09



2.10





2



2.06



2.04



2.07



2.04



2.01





2



2.01



1.98



2.05



2.08



2.06



May 21, 2022
SOLUTION.PDF
SOLUTION.PDF

Get Answer To This Question

Related Questions & Answers

More Questions »

Submit New Assignment

Copy and Paste Your Assignment Here
Have files?