6.34. A TIW layer is deposited on a substrate using a sput- tering tool. Table 6E.14 contains layer thickness - TABLE 6E.14 Layer Thickness Data for Exercise 6.34 Subgroup Ir 459 449 435 450 443 440...

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1    459    449    435    450
2    443    440    442    442
3    457    444    449    444
4    469    463    453    438
5    443    457    445    454
6    444    456    456    457
7    445    449    450    445
8    446    455    449    452
9    444    452    457    440
10    432    463    463    443
11    445    452    453    438
12    456    457    436    457
13    459    445    441    447
14    441    465    438    450
15    460    453    457    438
16    453    444    451    435
17    451    460    450    457
18    422    431    437    429
19    444    446    448    467
20    450    450    454    454

Extracted text: 6.34. A TIW layer is deposited on a substrate using a sput- tering tool. Table 6E.14 contains layer thickness - TABLE 6E.14 Layer Thickness Data for Exercise 6.34 Subgroup Ir 459 449 435 450 443 440 442 442 3 457 444 449 444 4 469 463 453 438 5 443 457 445 454 444 456 456 457 7 445 449 450 445 8 446 455 449 452 9 444 452 457 440 10 432 463 463 443 11 445 452 453 438 12 456 457 436 457 13 459 445 441 447 14 441 465 438 450 15 460 453 457 438 16 453 444 451 435 17 451 460 450 457 18 422 431 437 429 19 444 446 448 467 20 450 450 454 454


Extracted text: - TABLE 6E.15 Additional Thickness Data for Exercise 6.35. Subgroup X1 x2 x3 x4 21 454 449 443 461 22 449 441 444 455 23 442 442 442 450 24 443 452 438 430 25 446 459 457 457 26 454 448 445 462 27 458 449 453 438 28 450 449 445 451 29 443 440 443 451 30 457 450 452 437 measurements (in angstroms) on 20 subgroups of four substrates. (a) Set up ī and R control charts on this process. Is the process in control? Revise the control limits as necessary. (b) Estimate the mean and standard deviation of the process. (c) Is the layer thickness normally distributed? (d) If the specifications are at 450 + 30, estimate the process capability.